Heat flux sensor modeling

In this paper the silicon micromachined heat flux sensor is present. A thermal resistance of the sensor is defined by simple model and finite element model. Temperature distribution inside heat flux sensor is received. Modeling results is compared with experimental data.

Saved in:
Bibliographic Details
Main Authors: Gridchin, V.A., Lobach, O.V.
Format: Conference Proceeding
Language:English
Subjects:
Biomembranes
Conductors
Heat flux sensor
Mechanical sensors
MEMS
micromachined technology
Resistance heating
Sensor phenomena and characterization
Silicon
Temperature sensors
Thermal conductivity
Thermal resistance
Thermal sensors
thermopile
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:In this paper the silicon micromachined heat flux sensor is present. A thermal resistance of the sensor is defined by simple model and finite element model. Temperature distribution inside heat flux sensor is received. Modeling results is compared with experimental data.
DOI:10.1109/INTERNANO.2009.5335630