Microsensor on single ZnO microwire

For development of individual ZnO microwire in hydrogen sensors an environmentally benign synthesis process and fabrication route are required. Here we report a synthesis route for ZnO microwires using vapour phase process. Furthermore, our synthesis technique permits microwires to be transferred to...

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Bibliographic Details
Main Authors: Chai, G., Rusu, E., Chow, L., Stratan, G.I., Heinrich, H., Park, S., Schulte, A., Lupan, O., Trofim, V., Railean, S.
Format: Conference Proceeding
Language:English
Subjects:
Electronics industry
Hydrogen
hydrogen sensors
Industrial electronics
Materials science and technology
Microsensors
microwires
Railway engineering
Scanning electron microscopy
Temperature sensors
Transmission electron microscopy
vapour phase process
Zinc oxide
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Summary:For development of individual ZnO microwire in hydrogen sensors an environmentally benign synthesis process and fabrication route are required. Here we report a synthesis route for ZnO microwires using vapour phase process. Furthermore, our synthesis technique permits microwires to be transferred to other substrates. This offers the possibility of using focused ion beam instrument for handling. We fabricated a single microwire-based sensor and found ~4% sensitive hydrogen 200 ppm in the air at room temperature.
ISSN:1545-827X
2377-0678
DOI:10.1109/SMICND.2009.5336549