A simple approach for modelling and simulation monolithic inductors

This paper proposes one possible method for modelling silicon based RF meander type inductors. Based on the presented electrical model specialised software (Helix Meta2) for obtaining inductor electrical parameters is developed. In order to verify simulation results test inductor structures are fabr...

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Bibliographic Details
Main Authors: Maric, A., Radosavljevic, G., Zivanov, Lj, Stojanovic, G.
Format: Conference Proceeding
Language:English
Subjects:
Analytical models
Computational modeling
Connectors
Geometry
Inductance
Inductors
modelling
Radio frequency
RF meander inductor
Silicon
silicon technology
simulation
Solid modeling
Testing
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Summary:This paper proposes one possible method for modelling silicon based RF meander type inductors. Based on the presented electrical model specialised software (Helix Meta2) for obtaining inductor electrical parameters is developed. In order to verify simulation results test inductor structures are fabricated in the standard silicon technology. Their characteristics simulated with Helix Meta2 are compared to the ones obtained by experimental characterisation and simulation using commercial electromagnetic simulator. Good agreement of results is achieved and demonstrated on two test samples.
ISSN:1545-827X
2377-0678
DOI:10.1109/SMICND.2009.5336677