Application of nanosphere lithography to the fabrication of nanorod LEDs and to the performance enhancement of conventional LEDs

The process of nanosphere lithography was developed and applied to LED epistructure. We demonstrated p-i-n nanorod LED arrays with some specific characteristics. Moreover, LEDs encompassed with self-aligned nanorods are fabricated. Light diffraction behaviors are characterized. The results are expla...

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Bibliographic Details
Main Authors: Cheng, Yun-Wei, Lu, Tzu-Chun, Ke, Min-Yung, Pan, Kun-Mao, Chen, Liang-Yi, Chiang, Hung-Li, Huang, Ying-Yuan, Huang, JianJang
Format: Conference Proceeding
Language:English
Subjects:
Diffraction
Dry etching
Fabrication
Gallium nitride
Indium tin oxide
Light emitting diodes
Lithography
Nanoparticles
Optical propagation
Silicon compounds
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Summary:The process of nanosphere lithography was developed and applied to LED epistructure. We demonstrated p-i-n nanorod LED arrays with some specific characteristics. Moreover, LEDs encompassed with self-aligned nanorods are fabricated. Light diffraction behaviors are characterized. The results are explained by photonic crystal effect.
ISSN:2162-108X
2162-1098
DOI:10.1364/acp.2009.tun1