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Visualization, extraction and simulation of smart pixel circuits in three dimensions
We briefly describe a custom software package which allows (a) the visualization of microelectronic and micromechanical structures in 3-D, and (b) the accurate extraction of capacitances. We explore its initial application to a smart pixel circuit.
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Main Authors: | , , , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Online Access: | Request full text |
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Summary: | We briefly describe a custom software package which allows (a) the visualization of microelectronic and micromechanical structures in 3-D, and (b) the accurate extraction of capacitances. We explore its initial application to a smart pixel circuit. |
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DOI: | 10.1109/LEOSST.1996.540755 |