Development of a Flexible Robotic System for Multiscale Applications of Micro/Nanoscale Manipulation and Assembly

A flexible robotic system (FRS) developed for multiscale manipulation and assembly from nanoscale to microscale is presented. This system is based on the principle of atomic force microscopy and comprises two individually functionalized cantilevers. After reconfiguration, the robotic system could be...

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Bibliographic Details
Published in:IEEE/ASME transactions on mechatronics 2011-04, Vol.16 (2), p.266-276
Main Authors: Xie, Hui, Regnier, Stephane
Format: Article
Language:English
Subjects:
Assembly
Assembly systems
Atomic force microscope (AFM)
Atomic force microscopy
Automation
Electrons
flexible system
Industrial robots
Intelligent robots
Manufacturing engineering
micro- and nanomanipulation
Nanobioscience
Nanocomposites
Nanomaterials
Nanostructure
Nanostructured materials
Optical imaging
Parallel robots
robot
Robotic assembly
Robotics
Silicon
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Description
Summary:A flexible robotic system (FRS) developed for multiscale manipulation and assembly from nanoscale to microscale is presented. This system is based on the principle of atomic force microscopy and comprises two individually functionalized cantilevers. After reconfiguration, the robotic system could be used for pick-and-place manipulation from nanoscale to the scale of several micrometers, as well as parallel imaging/nanomanipulation. Flexibilities and manipulation capabilities of the developed system were validated by pick-and-place manipulation of microspheres and silicon nanowires to build 3-D micro/nanoscale structures in ambient conditions. Moreover, the capability of parallel nanomanipulation is certified by high-efficiency fabrication of a 2-D pattern with nanoparticles. Complicated micro/nanoscale manipulation and assembly can be reliably and efficiently performed using the proposed FRS.
ISSN:1083-4435
1941-014X
DOI:10.1109/TMECH.2010.2040483