Open loop compensation of the quadrature error in MEMS vibrating gyroscopes

This paper presents a simple, yet effective approach for rejecting the quadrature error in MEMS vibratory gyroscopes. The proposed solution consists of an open loop compensation that is performed on the proof-mass displacement readout signal provided by a standard capacitive sensing interface based...

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Bibliographic Details
Main Authors: Antonello, R., Oboe, R., Prandi, L., Caminada, C., Biganzoli, F.
Format: Conference Proceeding
Language:English
Subjects:
Acceleration
Capacitors
Damping
Equations
Gyroscopes
Mechanical sensors
Micromechanical devices
Sensor systems
Sensor systems and applications
Vibrations
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Summary:This paper presents a simple, yet effective approach for rejecting the quadrature error in MEMS vibratory gyroscopes. The proposed solution consists of an open loop compensation that is performed on the proof-mass displacement readout signal provided by a standard capacitive sensing interface based on parallel-plate capacitors. The compensating signal is generated and calibrated according to the nominal quadrature error to reject, and is injected into the system by means of a compensation circuit based on a dynamically reconfigurable capacitor bank. The compensation scheme described in the paper has been implemented on ASIC and experimentally tested on a real MEMS vibratory gyroscope. Experimental results show that the proposed solution assures good rejection capabilities, even for very large quadrature errors that unavoidably saturates the sensor readout interface.
ISSN:1553-572X
DOI:10.1109/IECON.2009.5415319