Investigation of inner surface of silicon microchannels fabricated by electrochemical method

Various silicon-based microchannels with different internal surface morphology is investigated to grow CNTs (carbon nanotubes) on the surface of the pore wall which may enhance the electron emission. The morphology of the samples prepared under different conditions is determined by scanning electron...

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Main Authors: Pengliang Ci, Jing Shi, Li Sun, Tao Liu, Lianwei Wang, Chu, P.K.
Format: Conference Proceeding
Language:English
Subjects:
Carbon nanotubes
Current density
Etching
Hafnium
Microchannel
Scanning electron microscopy
Shape control
Silicon
Surface morphology
Temperature
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Jing Shi
Li Sun
Tao Liu
Lianwei Wang
Chu, P.K.
description Various silicon-based microchannels with different internal surface morphology is investigated to grow CNTs (carbon nanotubes) on the surface of the pore wall which may enhance the electron emission. The morphology of the samples prepared under different conditions is determined by scanning electron microscopy (SEM). Parameters such as temperature, concentration of hydrofluoric acid, potential, current density, and so on are found to affect the inner surface of the pore wall.
doi_str_mv 10.1109/INEC.2010.5424440
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ispartof 2010 3rd International Nanoelectronics Conference (INEC), 2010, p.396-397
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source IEEE Xplore All Conference Series
subjects Carbon nanotubes
Current density
Etching
Hafnium
Microchannel
Scanning electron microscopy
Shape control
Silicon
Surface morphology
Temperature
title Investigation of inner surface of silicon microchannels fabricated by electrochemical method
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