Navigation grade MEMS accelerometer

This paper reports on a high performance navigation grade MEMS servo accelerometer targeted at inertial applications. Reported results are for a bulk MEMS capacitive sensor with 11g full scale over a 300 Hz bandwidth interfaced with a highly optimized servo-loop 5 th -order sigma-delta electronic. M...

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Bibliographic Details
Main Authors: Zwahlen, Pascal, Nguyen, Anne-Marie, Dong, Yufeng, Rudolf, Felix, Pastre, Marc, Schmid, Hanspeter
Format: Conference Proceeding
Language:English
Subjects:
Accelerometers
Bandwidth
Capacitive sensors
Delta-sigma modulation
Dynamic range
Micromechanical devices
Navigation
Noise measurement
Servomechanisms
Stability
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Summary:This paper reports on a high performance navigation grade MEMS servo accelerometer targeted at inertial applications. Reported results are for a bulk MEMS capacitive sensor with 11g full scale over a 300 Hz bandwidth interfaced with a highly optimized servo-loop 5 th -order sigma-delta electronic. Measurements demonstrate a long-term bias stability of +/-0.2mg, a second order non-linearity K2 < 5 ¿g/g 2 , an in-band noise floor of 1 ¿g/¿Hz and a Dynamic Range over 1 Hz bandwidth of 22 bits.
ISSN:1084-6999
DOI:10.1109/MEMSYS.2010.5442327