A generalized foundry CMOS platform for capacitively-transduced resonators monolithically integrated with amplifiers

A generalized foundry CMOS-MEMS platform suited for integrated micromechanical resonator circuits have been developed for commercial multi-user purpose and demonstrated with a fast turnaround time and a variety of design flexibilities for resonator applications. With this platform, different configu...

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Bibliographic Details
Main Authors: Wen-Chien Chen, Che-Sheng Chen, Kuei-Ann Wen, Long-Sheng Fan, Weileun Fang, Sheng-Shian Li
Format: Conference Proceeding
Language:English
Subjects:
Application specific integrated circuits
Boundary conditions
Fabrication
Flexible printed circuits
Foundries
Frequency
Integrated circuit technology
Mechanical sensors
Micromechanical devices
Radiofrequency integrated circuits
Online Access:Request full text
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Description
Summary:A generalized foundry CMOS-MEMS platform suited for integrated micromechanical resonator circuits have been developed for commercial multi-user purpose and demonstrated with a fast turnaround time and a variety of design flexibilities for resonator applications. With this platform, different configurations of capacitively-transduced resonators monolithically integrated with their associated amplifier circuits, spanning frequencies from 500 kHz to 14.5 MHz, have been realized with resonator Q's around 2,000. This platform specifically featured with various configurations of structural materials, different arrangements of mechanical boundary conditions, large transduction area, well-defined anchors, and performance enhancement scaling with IC fabrication technology, offers a variety of flexible design options suited for sensor and RF applications.
ISSN:1084-6999
DOI:10.1109/MEMSYS.2010.5442531