Novel Capacitive Pressure Sensor

A new microelectromechanical-systems capacitive pressure sensor with extremely high sensitivity (2.24 ¿F/kPa) is introduced. The sensor essentially consists of a small drop of mercury and a flat aluminum electrode that are separated by a 1 ¿m-thick layer of Barium Strontium Titanate (a high dielectr...

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Bibliographic Details
Published in:Journal of microelectromechanical systems 2010-06, Vol.19 (3), p.443-450
Main Authors: Bakhoum, Ezzat G, Cheng, Marvin H M
Format: Article
Language:English
Subjects:
Aluminum
Assembly
Barium
Barium strontium titanates
Capacitive pressure sensors
Capacitive sensors
Capacitors
Ceramics
Dielectrics
Electrodes
Exact sciences and technology
Fluid dynamics
Fundamental areas of phenomenology (including applications)
Instrumentation for fluid dynamics
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Mechanical instruments, equipment and techniques
Mercury
Micromechanical devices and systems
Physics
Pressure sensors
sensors
Strontium
Titanium compounds
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Summary:A new microelectromechanical-systems capacitive pressure sensor with extremely high sensitivity (2.24 ¿F/kPa) is introduced. The sensor essentially consists of a small drop of mercury and a flat aluminum electrode that are separated by a 1 ¿m-thick layer of Barium Strontium Titanate (a high dielectric-constant ceramic). The assembly constitutes a parallel-plate capacitor where the surface area of the electrodes is variable to a high degree. The mercury drop is pressured by a small corrugated metal diaphragm. As the electrode area of the parallel-plate capacitor varies, a total change in capacitance of more than 6 ¿F is obtained.
ISSN:1057-7157
1941-0158
DOI:10.1109/JMEMS.2010.2047632