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Novel Capacitive Pressure Sensor

A new microelectromechanical-systems capacitive pressure sensor with extremely high sensitivity (2.24 ¿F/kPa) is introduced. The sensor essentially consists of a small drop of mercury and a flat aluminum electrode that are separated by a 1 ¿m-thick layer of Barium Strontium Titanate (a high dielectr...

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Published in:	Journal of microelectromechanical systems 2010-06, Vol.19 (3), p.443-450
Main Authors:	Bakhoum, Ezzat G, Cheng, Marvin H M
Format:	Article
Language:	English
Subjects:	Aluminum Assembly Barium Barium strontium titanates Capacitive pressure sensors Capacitive sensors Capacitors Ceramics Dielectrics Electrodes Exact sciences and technology Fluid dynamics Fundamental areas of phenomenology (including applications) Instrumentation for fluid dynamics Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical instruments, equipment and techniques Mercury Micromechanical devices and systems Physics Pressure sensors sensors Strontium Titanium compounds
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container_title	Journal of microelectromechanical systems
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creator	Bakhoum, Ezzat G Cheng, Marvin H M
description	A new microelectromechanical-systems capacitive pressure sensor with extremely high sensitivity (2.24 ¿F/kPa) is introduced. The sensor essentially consists of a small drop of mercury and a flat aluminum electrode that are separated by a 1 ¿m-thick layer of Barium Strontium Titanate (a high dielectric-constant ceramic). The assembly constitutes a parallel-plate capacitor where the surface area of the electrodes is variable to a high degree. The mercury drop is pressured by a small corrugated metal diaphragm. As the electrode area of the parallel-plate capacitor varies, a total change in capacitance of more than 6 ¿F is obtained.
doi_str_mv	10.1109/JMEMS.2010.2047632
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source	IEEE Electronic Library (IEL) Journals
subjects	Aluminum Assembly Barium Barium strontium titanates Capacitive pressure sensors Capacitive sensors Capacitors Ceramics Dielectrics Electrodes Exact sciences and technology Fluid dynamics Fundamental areas of phenomenology (including applications) Instrumentation for fluid dynamics Instruments, apparatus, components and techniques common to several branches of physics and astronomy Mechanical instruments, equipment and techniques Mercury Micromechanical devices and systems Physics Pressure sensors sensors Strontium Titanium compounds
title	Novel Capacitive Pressure Sensor
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