Thermal expansion coefficient and compressibility of single crystal silicon

Accurately known values of material properties for single crystals of silicon are necessary, to apply corrections in a planned high precision determination of Avogadro's constant. Measurements of the coefficient of thermal expansion and of the compressibility of silicon are performed by interfe...

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Bibliographic Details
Main Authors: Potulski, E., Nicolaus, R.A., Darnedde, H., Bonsch, G.
Format: Conference Proceeding
Language:English
Subjects:
Atmospheric measurements
Length measurement
Optical interferometry
Optical scattering
Performance evaluation
Pressure measurement
Silicon
Temperature measurement
Thermal expansion
Volume measurement
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Summary:Accurately known values of material properties for single crystals of silicon are necessary, to apply corrections in a planned high precision determination of Avogadro's constant. Measurements of the coefficient of thermal expansion and of the compressibility of silicon are performed by interferometry in the range from vacuum to atmospheric pressure and from 15/spl deg/C to 25/spl deg/C.
DOI:10.1109/CPEM.1996.547171