Non-destructive current-ramp dielectric breakdown (IRDB) for fast BEOL reliability monitoring

A fast current-ramp dielectric breakdown (IRDB) method is developed for critical dielectric reliability assessment. Unlike the conventional voltage-ramp method, the nondestructive nature of IRDB still allows wafers to be shipped for revenue after reliability monitoring. This is an important criterio...

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Bibliographic Details
Main Authors: Kok-Yong Yiang, Francis, Rick, Marathe, Amit, Aubel, Oliver
Format: Conference Proceeding
Language:English
Subjects:
Breakdown voltage
Current measurement
Dielectric breakdown
Dielectric measurements
Electric breakdown
IRDB
Leakage current
Manufacturing
Monitoring
Power dissipation
Voltage measurement
VRDB
Online Access:Request full text
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Summary:A fast current-ramp dielectric breakdown (IRDB) method is developed for critical dielectric reliability assessment. Unlike the conventional voltage-ramp method, the nondestructive nature of IRDB still allows wafers to be shipped for revenue after reliability monitoring. This is an important criterion for reduced-cost, high-volume manufacturing.
ISSN:1541-7026
1938-1891
DOI:10.1109/IRPS.2010.5488842