Non-destructive current-ramp dielectric breakdown (IRDB) for fast BEOL reliability monitoring

A fast current-ramp dielectric breakdown (IRDB) method is developed for critical dielectric reliability assessment. Unlike the conventional voltage-ramp method, the nondestructive nature of IRDB still allows wafers to be shipped for revenue after reliability monitoring. This is an important criterio...

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Main Authors: Kok-Yong Yiang, Francis, Rick, Marathe, Amit, Aubel, Oliver
Format: Conference Proceeding
Language:English
Subjects:
Breakdown voltage
Current measurement
Dielectric breakdown
Dielectric measurements
Electric breakdown
IRDB
Leakage current
Manufacturing
Monitoring
Power dissipation
Voltage measurement
VRDB
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creator Kok-Yong Yiang
Francis, Rick
Marathe, Amit
Aubel, Oliver
description A fast current-ramp dielectric breakdown (IRDB) method is developed for critical dielectric reliability assessment. Unlike the conventional voltage-ramp method, the nondestructive nature of IRDB still allows wafers to be shipped for revenue after reliability monitoring. This is an important criterion for reduced-cost, high-volume manufacturing.
doi_str_mv 10.1109/IRPS.2010.5488842
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fullrecord <record><control><sourceid>ieee_CHZPO</sourceid><recordid>TN_cdi_ieee_primary_5488842</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><ieee_id>5488842</ieee_id><sourcerecordid>5488842</sourcerecordid><originalsourceid>FETCH-LOGICAL-i175t-c5b36f0950fd37cc3929ba3752992873c2addf7bec9e6eeb1e1870616915fd693</originalsourceid><addsrcrecordid>eNo9kEtLAzEYReOjYK39AeImS11E855kaWvVQrFSdSklk3wj0elMyaRK_70Fi3dzuBy4i4vQOaPXjFF7M108v1xzuqtKGmMkP0CnTHIpleTWHKI-s8IQZiw7-heCsuOdUJKRgnLdQ33DiZZUMHGChl33SXeRimsp--j9qW1IgC6njc_xG7DfpARNJsmt1jhEqMHnFD0uE7iv0P40-HK6uBtd4apNuHJdxqPJfIYT1NGVsY55i1dtE3ObYvNxhnqVqzsY7jlAb_eT1_Ejmc0fpuPbGYmsUJl4VQpdUatoFUThvbDclk4UilvLTSE8dyFURQneggYoGTBTUM20ZaoK2ooBuvjbjQCwXKe4cmm73F8mfgFzv1nB</addsrcrecordid><sourcetype>Publisher</sourcetype><iscdi>true</iscdi><recordtype>conference_proceeding</recordtype></control><display><type>conference_proceeding</type><title>Non-destructive current-ramp dielectric breakdown (IRDB) for fast BEOL reliability monitoring</title><source>IEEE Xplore All Conference Series</source><creator>Kok-Yong Yiang ; Francis, Rick ; Marathe, Amit ; Aubel, Oliver</creator><creatorcontrib>Kok-Yong Yiang ; Francis, Rick ; Marathe, Amit ; Aubel, Oliver</creatorcontrib><description>A fast current-ramp dielectric breakdown (IRDB) method is developed for critical dielectric reliability assessment. Unlike the conventional voltage-ramp method, the nondestructive nature of IRDB still allows wafers to be shipped for revenue after reliability monitoring. This is an important criterion for reduced-cost, high-volume manufacturing.</description><identifier>ISSN: 1541-7026</identifier><identifier>ISBN: 1424454301</identifier><identifier>ISBN: 9781424454303</identifier><identifier>EISSN: 1938-1891</identifier><identifier>EISBN: 1424454298</identifier><identifier>EISBN: 9781424454297</identifier><identifier>EISBN: 9781424454310</identifier><identifier>EISBN: 142445431X</identifier><identifier>DOI: 10.1109/IRPS.2010.5488842</identifier><identifier>LCCN: 82-640313</identifier><language>eng</language><publisher>IEEE</publisher><subject>Breakdown voltage ; Current measurement ; Dielectric breakdown ; Dielectric measurements ; Electric breakdown ; IRDB ; Leakage current ; Manufacturing ; Monitoring ; Power dissipation ; Voltage measurement ; VRDB</subject><ispartof>2010 IEEE International Reliability Physics Symposium, 2010, p.117-119</ispartof><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://ieeexplore.ieee.org/document/5488842$$EHTML$$P50$$Gieee$$H</linktohtml><link.rule.ids>309,310,780,784,789,790,2058,27925,54555,54920,54932</link.rule.ids><linktorsrc>$$Uhttps://ieeexplore.ieee.org/document/5488842$$EView_record_in_IEEE$$FView_record_in_$$GIEEE</linktorsrc></links><search><creatorcontrib>Kok-Yong Yiang</creatorcontrib><creatorcontrib>Francis, Rick</creatorcontrib><creatorcontrib>Marathe, Amit</creatorcontrib><creatorcontrib>Aubel, Oliver</creatorcontrib><title>Non-destructive current-ramp dielectric breakdown (IRDB) for fast BEOL reliability monitoring</title><title>2010 IEEE International Reliability Physics Symposium</title><addtitle>IRPS</addtitle><description>A fast current-ramp dielectric breakdown (IRDB) method is developed for critical dielectric reliability assessment. Unlike the conventional voltage-ramp method, the nondestructive nature of IRDB still allows wafers to be shipped for revenue after reliability monitoring. This is an important criterion for reduced-cost, high-volume manufacturing.</description><subject>Breakdown voltage</subject><subject>Current measurement</subject><subject>Dielectric breakdown</subject><subject>Dielectric measurements</subject><subject>Electric breakdown</subject><subject>IRDB</subject><subject>Leakage current</subject><subject>Manufacturing</subject><subject>Monitoring</subject><subject>Power dissipation</subject><subject>Voltage measurement</subject><subject>VRDB</subject><issn>1541-7026</issn><issn>1938-1891</issn><isbn>1424454301</isbn><isbn>9781424454303</isbn><isbn>1424454298</isbn><isbn>9781424454297</isbn><isbn>9781424454310</isbn><isbn>142445431X</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2010</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><recordid>eNo9kEtLAzEYReOjYK39AeImS11E855kaWvVQrFSdSklk3wj0elMyaRK_70Fi3dzuBy4i4vQOaPXjFF7M108v1xzuqtKGmMkP0CnTHIpleTWHKI-s8IQZiw7-heCsuOdUJKRgnLdQ33DiZZUMHGChl33SXeRimsp--j9qW1IgC6njc_xG7DfpARNJsmt1jhEqMHnFD0uE7iv0P40-HK6uBtd4apNuHJdxqPJfIYT1NGVsY55i1dtE3ObYvNxhnqVqzsY7jlAb_eT1_Ejmc0fpuPbGYmsUJl4VQpdUatoFUThvbDclk4UilvLTSE8dyFURQneggYoGTBTUM20ZaoK2ooBuvjbjQCwXKe4cmm73F8mfgFzv1nB</recordid><startdate>201005</startdate><enddate>201005</enddate><creator>Kok-Yong Yiang</creator><creator>Francis, Rick</creator><creator>Marathe, Amit</creator><creator>Aubel, Oliver</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>201005</creationdate><title>Non-destructive current-ramp dielectric breakdown (IRDB) for fast BEOL reliability monitoring</title><author>Kok-Yong Yiang ; Francis, Rick ; Marathe, Amit ; Aubel, Oliver</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i175t-c5b36f0950fd37cc3929ba3752992873c2addf7bec9e6eeb1e1870616915fd693</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2010</creationdate><topic>Breakdown voltage</topic><topic>Current measurement</topic><topic>Dielectric breakdown</topic><topic>Dielectric measurements</topic><topic>Electric breakdown</topic><topic>IRDB</topic><topic>Leakage current</topic><topic>Manufacturing</topic><topic>Monitoring</topic><topic>Power dissipation</topic><topic>Voltage measurement</topic><topic>VRDB</topic><toplevel>online_resources</toplevel><creatorcontrib>Kok-Yong Yiang</creatorcontrib><creatorcontrib>Francis, Rick</creatorcontrib><creatorcontrib>Marathe, Amit</creatorcontrib><creatorcontrib>Aubel, Oliver</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEL</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Kok-Yong Yiang</au><au>Francis, Rick</au><au>Marathe, Amit</au><au>Aubel, Oliver</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Non-destructive current-ramp dielectric breakdown (IRDB) for fast BEOL reliability monitoring</atitle><btitle>2010 IEEE International Reliability Physics Symposium</btitle><stitle>IRPS</stitle><date>2010-05</date><risdate>2010</risdate><spage>117</spage><epage>119</epage><pages>117-119</pages><issn>1541-7026</issn><eissn>1938-1891</eissn><isbn>1424454301</isbn><isbn>9781424454303</isbn><eisbn>1424454298</eisbn><eisbn>9781424454297</eisbn><eisbn>9781424454310</eisbn><eisbn>142445431X</eisbn><abstract>A fast current-ramp dielectric breakdown (IRDB) method is developed for critical dielectric reliability assessment. Unlike the conventional voltage-ramp method, the nondestructive nature of IRDB still allows wafers to be shipped for revenue after reliability monitoring. This is an important criterion for reduced-cost, high-volume manufacturing.</abstract><pub>IEEE</pub><doi>10.1109/IRPS.2010.5488842</doi><tpages>3</tpages></addata></record>
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1938-1891
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source IEEE Xplore All Conference Series
subjects Breakdown voltage
Current measurement
Dielectric breakdown
Dielectric measurements
Electric breakdown
IRDB
Leakage current
Manufacturing
Monitoring
Power dissipation
Voltage measurement
VRDB
title Non-destructive current-ramp dielectric breakdown (IRDB) for fast BEOL reliability monitoring
url http://sfxeu10.hosted.exlibrisgroup.com/loughborough?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-29T09%3A55%3A33IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-ieee_CHZPO&rft_val_fmt=info:ofi/fmt:kev:mtx:book&rft.genre=proceeding&rft.atitle=Non-destructive%20current-ramp%20dielectric%20breakdown%20(IRDB)%20for%20fast%20BEOL%20reliability%20monitoring&rft.btitle=2010%20IEEE%20International%20Reliability%20Physics%20Symposium&rft.au=Kok-Yong%20Yiang&rft.date=2010-05&rft.spage=117&rft.epage=119&rft.pages=117-119&rft.issn=1541-7026&rft.eissn=1938-1891&rft.isbn=1424454301&rft.isbn_list=9781424454303&rft_id=info:doi/10.1109/IRPS.2010.5488842&rft.eisbn=1424454298&rft.eisbn_list=9781424454297&rft.eisbn_list=9781424454310&rft.eisbn_list=142445431X&rft_dat=%3Cieee_CHZPO%3E5488842%3C/ieee_CHZPO%3E%3Cgrp_id%3Ecdi_FETCH-LOGICAL-i175t-c5b36f0950fd37cc3929ba3752992873c2addf7bec9e6eeb1e1870616915fd693%3C/grp_id%3E%3Coa%3E%3C/oa%3E%3Curl%3E%3C/url%3E&rft_id=info:oai/&rft_id=info:pmid/&rft_ieee_id=5488842&rfr_iscdi=true