High Q SAW resonator using upper-electrodes on grooved-electrodes in LiTaO3

Al-electrodes on 36-48°YX-LiTaO 3 substrates have been widely used in surface acoustic wave (SAW) filters and SAW duplexers because of having an optimum electro-mechanical coupling factor, reflection coefficient and good Q-factor. In this paper, authors proposed and constructed a new SAW structure c...

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Bibliographic Details
Main Authors: Kimura, Tetsuya, Kadota, Michio, Ida, Yasuyuki
Format: Conference Proceeding
Language:English
Subjects:
Acoustic reflection
Acoustic waves
Artificial intelligence
Electric resistance
Electrodes
Gold
grooved electrodes
LiTaO 3
Q factor
resonator
Resonator filters
SAW
SAW filters
Surface acoustic waves
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Summary:Al-electrodes on 36-48°YX-LiTaO 3 substrates have been widely used in surface acoustic wave (SAW) filters and SAW duplexers because of having an optimum electro-mechanical coupling factor, reflection coefficient and good Q-factor. In this paper, authors proposed and constructed a new SAW structure composed of upper Al-electrodes accumulated on lower grooved Cu-electrodes in the LiTaO 3 substrate, which has approximately same electro-mechanical coupling factor and reflection coefficient as the Al-electrodes (0.1λ)/36-48°YX-LiTaO 3 in order to realize high Q-factor. As the result, the SAW resonator having superior Q-factor was realized compared with that of Al-electrodes( 0.1λ)/42°YX-LiTaO 3 substrates.
ISSN:0149-645X
2576-7216
DOI:10.1109/MWSYM.2010.5516895