Novel fingerprint scanning arrays using polysilicon TFT's on glass and polymer substrates

Novel fingerprint scanning arrays based upon capacitance sensing have been made. Each sensor element consists of a capacitor electrode and two poly-Si thin film transistors for addressing and read out. The devices were fabricated on glass, polyimide and polyethersulphone substrates using a low tempe...

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Bibliographic Details
Published in:IEEE electron device letters 1997-01, Vol.18 (1), p.19-20
Main Authors: Young, N.D., Harkin, G., Bunn, R.M., McCulloch, D.J., Wilks, R.W., Knapp, A.G.
Format: Article
Language:English
Subjects:
Capacitance
Capacitive sensors
Capacitors
Electrodes
Fingerprint recognition
Glass
Polyimides
Substrates
Thin film sensors
Thin film transistors
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Summary:Novel fingerprint scanning arrays based upon capacitance sensing have been made. Each sensor element consists of a capacitor electrode and two poly-Si thin film transistors for addressing and read out. The devices were fabricated on glass, polyimide and polyethersulphone substrates using a low temperature (
ISSN:0741-3106
1558-0563
DOI:10.1109/55.553063