Influence of O2 plasma treatment on H2 post-treated BZO thin films for TCO of a-Si solar cell

In order to achieve a high efficient a-Si solar cell, the TCO (transparent conductive oxide) substrates are required to be a low sheet resistivity, a high transparency, and a textured surface with light trapping effect. Recently, a zinc oxide (ZnO) thin film attracts our attention as new coating mat...

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Bibliographic Details
Main Authors: Ha Jin Yoo, Chang Gil Son, Eun Ha Choi, Guangsup Cho, Gi Chung Kwon, Won Tea Cho, Sang Gi Park
Format: Conference Proceeding
Language:English
Subjects:
Hydrogen
Optical films
Photovoltaic cells
Plasma applications
Plasma measurements
Plasma properties
Surface morphology
Surface treatment
Transistors
Zinc oxide
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Summary:In order to achieve a high efficient a-Si solar cell, the TCO (transparent conductive oxide) substrates are required to be a low sheet resistivity, a high transparency, and a textured surface with light trapping effect. Recently, a zinc oxide (ZnO) thin film attracts our attention as new coating material having a good transparent and conductive for TCO of solar cells 1-2 .
ISSN:0730-9244
2576-7208
DOI:10.1109/PLASMA.2010.5534131