A general description of active resonance spectroscopic diagnostic tools for technical plasmas

This contribution investigates resonance spectroscopic plasma diagnostic. The idea is simple - the frequency dependence of the power absorption is displayed via a rf-signal fed to an antenna. Using the absorption spectrum, plasma parameter like the electron density or electron temperature are calcul...

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Bibliographic Details
Main Authors: Lapke, M, Oberrath, J, Mussenbrock, T, Brinkmann, R P
Format: Conference Proceeding
Language:English
Subjects:
Absorption
Electrons
Frequency dependence
Plasma applications
Plasma density
Plasma diagnostics
Plasma displays
Plasma temperature
Resonance
Spectroscopy
Online Access:Request full text
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Description
Summary:This contribution investigates resonance spectroscopic plasma diagnostic. The idea is simple - the frequency dependence of the power absorption is displayed via a rf-signal fed to an antenna. Using the absorption spectrum, plasma parameter like the electron density or electron temperature are calculated. Starting five decades ago numerous concepts based on this idea have been developed as a promising concept for plasma diagnostics in an industrial setting - which means that the proposed methods are robust, calibration free, and economical, and can be used for ideal and reactive plasmas alike.
ISSN:0730-9244
2576-7208
DOI:10.1109/PLASMA.2010.5534407