Finite element analysis of circular quartz crystal with arc force and force -frequency sensitive experiments

Stress distribution of the circular quartz crystal in various regions was performed by using ANSYS finite element simulation when plus with different arc force along x axis. The ratio of stress variety for the center of three electrodes on the chip was calculated. Frequency change of three electrode...

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Bibliographic Details
Main Authors: Shaopeng Li, Wenjie Tian, Zhao Qingjiang
Format: Conference Proceeding
Language:English
Subjects:
Acceleration
Analytical models
ANSYS
arc force
Electrodes
Finite element methods
Force sensors
force-frequency sensitivity coefficients
Frequency measurement
quartz resonator
Resonance
Resonant frequency
Strain measurement
Stress
stress distribution
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Summary:Stress distribution of the circular quartz crystal in various regions was performed by using ANSYS finite element simulation when plus with different arc force along x axis. The ratio of stress variety for the center of three electrodes on the chip was calculated. Frequency change of three electrodes was tested on experiment, and the ratio of force-frequency sensitivity coefficient has been calculated. The comparison with experimental data shows that: the results of ANSYS simulation analysis are similar with the experiment, and the maximum relative error is 1.09%. So this proves that ANSYS simulation analysis is feasible.
DOI:10.1109/ICINDMA.2010.5538192