A smart sampling algorithm to minimize risk dynamically

In order to maximize the information and thus to minimize risk from measurement and to take into account measurement capacities, an algorithm is proposed to sample lots. An indicator, called Global Sampling Indicator (GSI), has been defined to select the lots to sample, and to schedule them on the m...

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Bibliographic Details
Main Authors: Dauzere-Peres, S, Rouveyrol, J, Yugma, C, Vialletelle, P
Format: Conference Proceeding
Language:English
Subjects:
Current measurement
Manufacturing
Metrology
Production
Schedules
Semiconductor device measurement
Time measurement
Online Access:Request full text
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Description
Summary:In order to maximize the information and thus to minimize risk from measurement and to take into account measurement capacities, an algorithm is proposed to sample lots. An indicator, called Global Sampling Indicator (GSI), has been defined to select the lots to sample, and to schedule them on the measurement tools. A simulator called S5 (Smart Sampling Scheduling and Skipping Simulator) has been implemented and validated on actual data. It shows that the risks can be strongly reduced while keeping a limited number of measures.
ISSN:1078-8743
2376-6697
DOI:10.1109/ASMC.2010.5551470