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Investigations of SAW delay lines on c-plane AlN/sapphire at elevated temperatures
Aluminum nitride (AlN) on sapphire is a promising substrate for SAW (surface acoustic wave) sensors operating at high temperatures and high frequencies. To get an experimental measure of the suitability and temperature stability of such devices, several samples of SAW delay lines were fabricated on...
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creator | Bruckner, G Bardong, J Fachberger, R Forsen, E Eisele, D |
description | Aluminum nitride (AlN) on sapphire is a promising substrate for SAW (surface acoustic wave) sensors operating at high temperatures and high frequencies. To get an experimental measure of the suitability and temperature stability of such devices, several samples of SAW delay lines were fabricated on 2" c-plane (0001) sapphire substrates with 1 μm c-plane AlN layer on top. Time- and frequency responses were recorded during annealing treatments at temperatures up to 850°C and the signals were analyzed afterwards. |
doi_str_mv | 10.1109/FREQ.2010.5556280 |
format | conference_proceeding |
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Time- and frequency responses were recorded during annealing treatments at temperatures up to 850°C and the signals were analyzed afterwards.</description><subject>Delay</subject><subject>Delay lines</subject><subject>Electrodes</subject><subject>Plasma temperature</subject><subject>Substrates</subject><subject>Temperature measurement</subject><subject>Temperature sensors</subject><issn>2327-1914</issn><isbn>1424463998</isbn><isbn>9781424463992</isbn><isbn>9781424464012</isbn><isbn>1424464005</isbn><isbn>1424464013</isbn><isbn>9781424464005</isbn><fulltext>true</fulltext><rsrctype>conference_proceeding</rsrctype><creationdate>2010</creationdate><recordtype>conference_proceeding</recordtype><sourceid>6IE</sourceid><recordid>eNotkM1OwkAURscoiYg8gHEzL1C4M507P0tCQEmIRtS4JDPtrdaU0nRGEt5eElidnLP4Fh9jDwImQoCbLjeLt4mEkyKilhau2NgZK5RUSisQ8prdnSV3zt6wocylyYQTasCG1mQalQRzy8Yx_gKAcM5pxCHbrNoDxVR_-1Tv28j3FX-fffGSGn_kTd3SKbW8yLrGt8Rnzcs0-q77qXviPnFq6OATlTzRrqPep7-e4j0bVL6JNL5wxD6Xi4_5c7Z-fVrNZ-usFgZTJqqyDNYUxhcQUKpQgseAUEirgybE4CrUVoRKS-lEQA3WBSTQymhtVT5ij-fdmoi2XV_vfH_cXu7J_wF15FQQ</recordid><startdate>201006</startdate><enddate>201006</enddate><creator>Bruckner, G</creator><creator>Bardong, J</creator><creator>Fachberger, R</creator><creator>Forsen, E</creator><creator>Eisele, D</creator><general>IEEE</general><scope>6IE</scope><scope>6IH</scope><scope>CBEJK</scope><scope>RIE</scope><scope>RIO</scope></search><sort><creationdate>201006</creationdate><title>Investigations of SAW delay lines on c-plane AlN/sapphire at elevated temperatures</title><author>Bruckner, G ; Bardong, J ; Fachberger, R ; Forsen, E ; Eisele, D</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-i175t-1fddb87c7ac0b524bd0a5b50c286b6e55b9f5681bf62291b56089b5e064766843</frbrgroupid><rsrctype>conference_proceedings</rsrctype><prefilter>conference_proceedings</prefilter><language>eng</language><creationdate>2010</creationdate><topic>Delay</topic><topic>Delay lines</topic><topic>Electrodes</topic><topic>Plasma temperature</topic><topic>Substrates</topic><topic>Temperature measurement</topic><topic>Temperature sensors</topic><toplevel>online_resources</toplevel><creatorcontrib>Bruckner, G</creatorcontrib><creatorcontrib>Bardong, J</creatorcontrib><creatorcontrib>Fachberger, R</creatorcontrib><creatorcontrib>Forsen, E</creatorcontrib><creatorcontrib>Eisele, D</creatorcontrib><collection>IEEE Electronic Library (IEL) Conference Proceedings</collection><collection>IEEE Proceedings Order Plan (POP) 1998-present by volume</collection><collection>IEEE Xplore All Conference Proceedings</collection><collection>IEEE Xplore (Online service)</collection><collection>IEEE Proceedings Order Plans (POP) 1998-present</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Bruckner, G</au><au>Bardong, J</au><au>Fachberger, R</au><au>Forsen, E</au><au>Eisele, D</au><format>book</format><genre>proceeding</genre><ristype>CONF</ristype><atitle>Investigations of SAW delay lines on c-plane AlN/sapphire at elevated temperatures</atitle><btitle>2010 IEEE International Frequency Control Symposium</btitle><stitle>FREQ</stitle><date>2010-06</date><risdate>2010</risdate><spage>499</spage><epage>502</epage><pages>499-502</pages><issn>2327-1914</issn><isbn>1424463998</isbn><isbn>9781424463992</isbn><eisbn>9781424464012</eisbn><eisbn>1424464005</eisbn><eisbn>1424464013</eisbn><eisbn>9781424464005</eisbn><abstract>Aluminum nitride (AlN) on sapphire is a promising substrate for SAW (surface acoustic wave) sensors operating at high temperatures and high frequencies. To get an experimental measure of the suitability and temperature stability of such devices, several samples of SAW delay lines were fabricated on 2" c-plane (0001) sapphire substrates with 1 μm c-plane AlN layer on top. Time- and frequency responses were recorded during annealing treatments at temperatures up to 850°C and the signals were analyzed afterwards.</abstract><pub>IEEE</pub><doi>10.1109/FREQ.2010.5556280</doi><tpages>4</tpages></addata></record> |
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ispartof | 2010 IEEE International Frequency Control Symposium, 2010, p.499-502 |
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language | eng |
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source | IEEE Xplore All Conference Series |
subjects | Delay Delay lines Electrodes Plasma temperature Substrates Temperature measurement Temperature sensors |
title | Investigations of SAW delay lines on c-plane AlN/sapphire at elevated temperatures |
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