Micro-torque sensor based on differential force measurement

A torque sensing device based on differential force measurement having a resolution of 0.05 /spl mu/N.m over a working range from -200 /spl mu/N.m to 200 /spl mu/N.m is presented, The volume of the device is 3 cm by 3 cm by 1 cm. This paper shows that the simultaneous use of silicon bulk-machined co...

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Bibliographic Details
Main Authors: Gass, V., van der Schoot, B.H., Jeanneret, S., de Rooij, N.F.
Format: Conference Proceeding
Language:English
Subjects:
Blades
Energy storage
Fasteners
Force measurement
Force sensors
Shafts
Silicon
Springs
Torque measurement
Watches
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Summary:A torque sensing device based on differential force measurement having a resolution of 0.05 /spl mu/N.m over a working range from -200 /spl mu/N.m to 200 /spl mu/N.m is presented, The volume of the device is 3 cm by 3 cm by 1 cm. This paper shows that the simultaneous use of silicon bulk-machined components and miniaturised high precision mechanical structures in a hybrid configuration can solve industrial measurement problems elegantly.
DOI:10.1109/MEMSYS.1994.555630