SU-8 resonator antenna

In this paper, radiation properties and impedance characteristics of lithographically patterned SU-8 structures are discussed. X-ray lithography fabrication process and excitation method of SU-8 resonator antennas are reviewed. Wide band operation is examined by merging the resonances of the SU-8 re...

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Main Authors: Rashidian, A, Klymyshyn, D M, Aligodarz, M T, Boerner, M, Mohr, J
Format: Conference Proceeding
Language:English
Subjects:
Antenna measurements
Apertures
Fabrication
Microwave antennas
Optical waveguides
Permittivity
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Klymyshyn, D M
Aligodarz, M T
Boerner, M
Mohr, J
description In this paper, radiation properties and impedance characteristics of lithographically patterned SU-8 structures are discussed. X-ray lithography fabrication process and excitation method of SU-8 resonator antennas are reviewed. Wide band operation is examined by merging the resonances of the SU-8 resonator antenna and an aperture antenna. Reflection coefficient measurement of fabricated antennas is provided. The effects of SU-8 loss tangent and substrate permittivity on antenna gain and efficiency are addressed.
doi_str_mv 10.1109/APS.2010.5562132
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subjects Antenna measurements
Apertures
Fabrication
Microwave antennas
Optical waveguides
Permittivity
title SU-8 resonator antenna
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