Features of micron-sized mesa-piezoresistor

The effect of dihedral angles in the junction region of tensoresistive layer to contact pads on strain distribution in mesa-piezoresistor body was studied using the finite element method. Influence of mesa-piezoresistor geometry on its sensitivity was demonstrated.

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Bibliographic Details
Main Authors: Gridchin, V A, Chebanov, M A
Format: Conference Proceeding
Language:English
Subjects:
Finite element method
mechanical stress concentrator
mesa-piezoresistor
pressure sensor
Silicon
Strain
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Description
Summary:The effect of dihedral angles in the junction region of tensoresistive layer to contact pads on strain distribution in mesa-piezoresistor body was studied using the finite element method. Influence of mesa-piezoresistor geometry on its sensitivity was demonstrated.
ISSN:1815-3712
DOI:10.1109/EDM.2010.5568638