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THz uncooled microbolometer array development for active imaging and spectroscopy applications
A first prototype of 320×240 antenna-coupled un-cooled a-Si micro-bolometers array has been designed and processed. Beam profiles emitted by THz QCLs have been imaged while different samples were introduced in the THz beam optical path. We report first essays of material identification.
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Main Authors: | , , , , , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Online Access: | Request full text |
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Summary: | A first prototype of 320×240 antenna-coupled un-cooled a-Si micro-bolometers array has been designed and processed. Beam profiles emitted by THz QCLs have been imaged while different samples were introduced in the THz beam optical path. We report first essays of material identification. |
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ISSN: | 2162-2027 |
DOI: | 10.1109/ICIMW.2010.5612553 |