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THz uncooled microbolometer array development for active imaging and spectroscopy applications

A first prototype of 320×240 antenna-coupled un-cooled a-Si micro-bolometers array has been designed and processed. Beam profiles emitted by THz QCLs have been imaged while different samples were introduced in the THz beam optical path. We report first essays of material identification.

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Bibliographic Details
Main Authors: Simoens, François, Meilhan, Jérôme, Pocas, Stéphane, Ouvrier-Buffet, Jean-Louis, Maillou, Thierry, Gellie, Pierre, Barbieri, Stefano
Format: Conference Proceeding
Language:English
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Description
Summary:A first prototype of 320×240 antenna-coupled un-cooled a-Si micro-bolometers array has been designed and processed. Beam profiles emitted by THz QCLs have been imaged while different samples were introduced in the THz beam optical path. We report first essays of material identification.
ISSN:2162-2027
DOI:10.1109/ICIMW.2010.5612553