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Development of 90Nm InGaAs HEMTs and Benchmarking Logic Performance with Si CMOS
We have developed 90nm In 0.7 Ga 0.3 As channel HEMTs, directly measured of DC and RF characteristics, and performed microwave modeling for both 90nm Si CMOS and HEMT for benchmarking logic performance for future design layout and process improvement.
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Main Authors: | , , , , , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Online Access: | Request full text |
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Summary: | We have developed 90nm In 0.7 Ga 0.3 As channel HEMTs, directly measured of DC and RF characteristics, and performed microwave modeling for both 90nm Si CMOS and HEMT for benchmarking logic performance for future design layout and process improvement. |
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ISSN: | 1550-8781 2374-8443 |
DOI: | 10.1109/CSICS.2010.5619674 |