Study of power arrays in ESD operation regimes

The self-protection capability of arrays as a layout dependent parameter have been studied using a novel 2.5D simulation methodology. Several topology elements are identified to improve HBM robustness of the arrays. The physical effects responsible for local burnout are demonstrated based upon simul...

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Bibliographic Details
Main Authors: Aliaj, B, Vashchenko, V, Lindorfer, P, Tcherniaev, A, Ershov, M, Liou, J J, Hopper, P
Format: Conference Proceeding
Language:English
Subjects:
Current distribution
Electrostatic discharge
Layout
Logic gates
Metals
Resistance
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Summary:The self-protection capability of arrays as a layout dependent parameter have been studied using a novel 2.5D simulation methodology. Several topology elements are identified to improve HBM robustness of the arrays. The physical effects responsible for local burnout are demonstrated based upon simulation tool capability.