Scaled silicon nanoelectromechanical (NEM) hybrid systems

In this paper we overview recent attempts at co-integrating silicon nano-electro-mechanical systems (NEMS) with nanoelectronic devices aiming to add more functionalities to conventional electronic devices in `More-than-Moore' domain and also explore novel operating principles in `Beyond CMOS�...

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Bibliographic Details
Main Authors: Mizuta, H, Garcia-Ramirez, M A, Hassani, F A, Ghiass, M A, Kalhor, N, Moktadir, Z, Tsuchiya, Y, Sawai, S, Ogi, J, Oda, S
Format: Conference Proceeding
Language:English
Subjects:
Atomic layer deposition
CMOS integrated circuits
Logic gates
Nanoelectromechanical systems
Nanoscale devices
Phonons
Silicon
Online Access:Request full text
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Summary:In this paper we overview recent attempts at co-integrating silicon nano-electro-mechanical systems (NEMS) with nanoelectronic devices aiming to add more functionalities to conventional electronic devices in `More-than-Moore' domain and also explore novel operating principles in `Beyond CMOS' domain.
DOI:10.1109/ICSICT.2010.5667601