Nano-graphite formation enhanced by fluorine in gas phase of carbon sputtering plasmas

The particles grown in gas phase of carbon sputtering plasmas were observed, and analyzed in chemical composition and atomic arrangement. The atomic arrangement obviously changed from amorphous to crystalline with addition of fluorine-contained gas (CF4). The fluorine atom enhanced the formation of...

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Bibliographic Details
Main Authors: Ide, Tomo, Nishio, Koji, Takahashi, Kazuo
Format: Conference Proceeding
Language:English
Subjects:
Argon
Carbon
Chemicals
Plasma temperature
Sputtering
Substrates
Online Access:Request full text
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Summary:The particles grown in gas phase of carbon sputtering plasmas were observed, and analyzed in chemical composition and atomic arrangement. The atomic arrangement obviously changed from amorphous to crystalline with addition of fluorine-contained gas (CF4). The fluorine atom enhanced the formation of nano-sized particles with graphite structure. The fluorine content was not be found in the crystalline structure of graphite, which implied that chemical reactions made fluorocarbon or carbon molecules transformed to graphite with removing of fluorine.
ISSN:2159-3442
2159-3450
DOI:10.1109/TENCON.2010.5685966