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Coaxial tip piezoresistive scanning probes with sub-nanometer vertical displacement resolution
We present the design and fabrication of an improved probe for scanning gate microscopy (SGM). Like our previously reported design, the new probe integrates a coaxial tip to produce highly localized electric fields and a piezoresistor to self-sense tip deflection. However, the new design achieves a...
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creator | Harjee, Nahid Haemmerli, Alexandre Goldhaber-Gordon, David Pruitt, Beth L |
description | We present the design and fabrication of an improved probe for scanning gate microscopy (SGM). Like our previously reported design, the new probe integrates a coaxial tip to produce highly localized electric fields and a piezoresistor to self-sense tip deflection. However, the new design achieves a vertical displacement resolution of 3.7 Å in a 10 kHz bandwidth, enabling the study of both topography and electron organization of semiconductor nanostructures with sub-nanometer features. The design is based on a numerical optimizer for force-sensing piezoresistive cantilevers, which we have extended for SGM. |
doi_str_mv | 10.1109/ICSENS.2010.5689882 |
format | conference_proceeding |
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Like our previously reported design, the new probe integrates a coaxial tip to produce highly localized electric fields and a piezoresistor to self-sense tip deflection. However, the new design achieves a vertical displacement resolution of 3.7 Å in a 10 kHz bandwidth, enabling the study of both topography and electron organization of semiconductor nanostructures with sub-nanometer features. The design is based on a numerical optimizer for force-sensing piezoresistive cantilevers, which we have extended for SGM.</abstract><pub>IEEE</pub><doi>10.1109/ICSENS.2010.5689882</doi><tpages>5</tpages></addata></record> |
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ispartof | 2010 IEEE Sensors, 2010, p.1962-1966 |
issn | 1930-0395 2168-9229 |
language | eng |
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source | IEEE Xplore All Conference Series |
subjects | Leg Noise Piezoresistance Probes Resists Sensitivity Silicon |
title | Coaxial tip piezoresistive scanning probes with sub-nanometer vertical displacement resolution |
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