Design Space Exploration of Z-Axis CMOS-MEMS Accelerometers

The dimensions of a CMOS-MEMS Z-axis accelerometer are varied in a parametric study that pursues to explore the design space of the spring stiffness that can be achieved by this device. The results of the spring stiffness obtained via simulation will be compared to the one obtained via analytical re...

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Bibliographic Details
Main Authors: Méndez, A, Camacho-León, S, Martínez-Chapa, S O
Format: Conference Proceeding
Language:English
Subjects:
accelerometer
Accelerometers
Analytical models
Capacitance
CMOS-MEMS
Sensors
Space exploration
Springs
Topology
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Summary:The dimensions of a CMOS-MEMS Z-axis accelerometer are varied in a parametric study that pursues to explore the design space of the spring stiffness that can be achieved by this device. The results of the spring stiffness obtained via simulation will be compared to the one obtained via analytical results, to evaluate the accuracy obtained by using the analytical formulas.
DOI:10.1109/CERMA.2010.88