Determination of the local electron density based on millimeter wave interferometry II: Experimental operations and comparisons

The determination method of the local electron density is shown based on millimeter wave interferometry and the electron density measuring is experimented on a cylindrical capacitively coupled plasmas (CCP) setup. Results show the excellent agreement between the radial density profiles in the centra...

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Bibliographic Details
Main Authors: Zhaoquan Chen, Minghai Liu, Lingli Hong, Qiyan Zhou, Xiwei Hu
Format: Conference Proceeding
Language:English
Subjects:
Measurement uncertainty
Microwave FET integrated circuits
Microwave integrated circuits
Microwave measurements
Online Access:Request full text
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Summary:The determination method of the local electron density is shown based on millimeter wave interferometry and the electron density measuring is experimented on a cylindrical capacitively coupled plasmas (CCP) setup. Results show the excellent agreement between the radial density profiles in the central plane measured by interferometry with the proposed analysis method and by the Langmuir probe system.
DOI:10.1109/ISAPE.2010.5696541