A vibrating micro-resonator design for gyroscope applications using TIA

This paper presents a vibrating micro-resonator using transimpedance amplifier (TIA) for gyroscope applications. First, a gyroscope model is built for sensor design. The critical parameters are optimized by theoretical calculation and fine tuned by finite-element-analysis (FEM). Then, SOG-bulk micro...

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Bibliographic Details
Main Authors: Sheng-Ren Chiu, Jen-Yi Chen, Li-Tao Teng, Chung-Yang Sue, Shih-Ting Lin, Yu-Wen Hsu, Yan-Kuin Su
Format: Conference Proceeding
Language:English
Subjects:
Accelerometers
Application specific integrated circuits
Fingers
Force
Gyroscopes
Resonant frequency
Sensors
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Summary:This paper presents a vibrating micro-resonator using transimpedance amplifier (TIA) for gyroscope applications. First, a gyroscope model is built for sensor design. The critical parameters are optimized by theoretical calculation and fine tuned by finite-element-analysis (FEM). Then, SOG-bulk micromachining and deep reactive ion etching (DRIE) are adopted to fabricate the gyroscope with high aspect-ratio sensing structure and high yield. Finally, an ASIC, TIA with large on-chip transimpedance is developed for driving loop to accomplish a self-oscillated micro-resonator.
ISSN:2150-5934
2150-5942
DOI:10.1109/IMPACT.2010.5699632