High-Sensitivity Inductive Pressure Sensor

A new type of pressure sensors with extremely high sensitivity is introduced. Unlike piezoresistive, capacitive, and linear-variable-differential-transformer-based pressure sensors, the new sensor is based on a technique for substantially changing the inductance of a coil. The prototype device has d...

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Bibliographic Details
Published in:IEEE transactions on instrumentation and measurement 2011-08, Vol.60 (8), p.2960-2966
Main Authors: Bakhoum, Ezzat G., Cheng, Marvin H. M.
Format: Article
Language:English
Subjects:
Coiling
Coils
Devices
Hysteresis
Inductance
Inductance-to-frequency converter
Instrumentation
Iron
Linearity
pressure hysteresis
Pressure measurement
pressure sensor
Pressure sensors
relative permeability
Sensitivity
Sensors
temperature hysteresis
Temperature sensors
variable inductance
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Description
Summary:A new type of pressure sensors with extremely high sensitivity is introduced. Unlike piezoresistive, capacitive, and linear-variable-differential-transformer-based pressure sensors, the new sensor is based on a technique for substantially changing the inductance of a coil. The prototype device has demonstrated a change in inductance of approximately 34.5 mH over a pressure range of 10 kPa. The sensor offers a number of desirable features, including linearity, low temperature, and pressure hysteresis, in addition to small size.
ISSN:0018-9456
1557-9662
DOI:10.1109/TIM.2011.2118910