Temperature sensitive microwire arrays for artificial whisker electronics

We propose an out-of-plane high-aspect-ratio temperature sensitive "whisker-like" microwire array for use in multisite temperature detection with a high spatial resolution. This sensor is based on vertically assembled force sensitive p-type (p-) silicon microwires on an n-type silicon subs...

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Main Authors: Ikedo, A, Ishida, M, Kawano, T
Format: Conference Proceeding
Language:English
Subjects:
Needles
Robot sensing systems
Silicon
Temperature measurement
Temperature sensors
Wire
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Ishida, M
Kawano, T
description We propose an out-of-plane high-aspect-ratio temperature sensitive "whisker-like" microwire array for use in multisite temperature detection with a high spatial resolution. This sensor is based on vertically assembled force sensitive p-type (p-) silicon microwires on an n-type silicon substrate, which resulted in a p-silicon wire/p-n diode system array. The shift in the rectifying current-voltage (I-V) curves of the embedded p-n diode depends on the temperature through the wire. Thus, the same alignment can be used as a force sensor and temperature sensor. Both force and temperature sensitive microwire sensor arrays with a small detection area (~20 μm2) and high spatial resolution (~100 μm in pitch) have potential in numerous applications, including artificial fingertips in a robot hand/prosthetics.
doi_str_mv 10.1109/MEMSYS.2011.5734378
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subjects Needles
Robot sensing systems
Silicon
Temperature measurement
Temperature sensors
Wire
title Temperature sensitive microwire arrays for artificial whisker electronics
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