Corrosion resistance consolidation of a diaphragm type vacuum sensor

This paper describes the corrosion resistance consolidation of a diaphragm type vacuum sensor using a high corrosion resistance material. Initially, we had fabricated a vacuum sensor using a Ru based thin film amorphous alloy, whose high corrosion resistance was confirmed in wet tests. In the high c...

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Bibliographic Details
Main Authors: Kozako, H, Sakurai, J, Mukai, N, Ohnuma, Y, Takahashii, T, Hata, S
Format: Conference Proceeding
Language:English
Subjects:
Capacitance
Corrosion
Nickel
Resistance
Substrates
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Summary:This paper describes the corrosion resistance consolidation of a diaphragm type vacuum sensor using a high corrosion resistance material. Initially, we had fabricated a vacuum sensor using a Ru based thin film amorphous alloy, whose high corrosion resistance was confirmed in wet tests. In the high corrosion gas tests, however, the sensor resists NF 3 and COF 2 gases but does not resist ClF 3 gas. Therefore, we searched for new Ni based amorphous alloys which can also resist ClF 3 using a combinatorial search based on a MEMS process. We were able to fabricate new sensors using Ni 56 Nb 33 Ti 11 and Ni 49 Nb 35 Ti 16 amorphous alloys which were shown to resist all three mentioned gases.
ISSN:1084-6999
DOI:10.1109/MEMSYS.2011.5734446