50Ω-terminated 900MHz monolithic lateral-extensional piezoelectric filters on ultrananocryslalline diamond

For the first time, very low insertion loss (3.7 dB) 900 MHz micromachined bulk-lateral mode filters are reported with 50 Ω termination impedance. Two lateral-extensional modes of a single resonant structure are coupled together to enable low insertion loss (IL) while maintaining a very small footpr...

Full description

Saved in:
Bibliographic Details
Main Authors: Fatemi, H, Harrington, B P, Zeng, H, Carlisle, J, Abdolvand, R
Format: Conference Proceeding
Language:English
Subjects:
Diamond-like carbon
Frequency measurement
Microwave filters
Resonant frequency
Resonator filters
Temperature measurement
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:For the first time, very low insertion loss (3.7 dB) 900 MHz micromachined bulk-lateral mode filters are reported with 50 Ω termination impedance. Two lateral-extensional modes of a single resonant structure are coupled together to enable low insertion loss (IL) while maintaining a very small footprint (~ 2666 μm × 2666 μm). These narrow-band filters are fabricated on a thin-film piezoelectric-on-diamond (TPoD) platform and demonstrate an adjustable fractional bandwidth between ~0.1 to 0.4 percent.
ISSN:1084-6999
DOI:10.1109/MEMSYS.2011.5734532