Experimental characterization of LIGA fabricated 0.22 THz TWT circuits

In this paper we report precision MEMS Fabrication using novel LIGA technique for 0.22 THz micro-metallic staggered double-vane TWT circuits. For this high aspect ratio structure negative tone photo-resist KMPR was used. The entire fabrication process starting from spin coating, UV-lithography, elec...

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Bibliographic Details
Main Authors: Baig, Anisullah, Gamzina, D, Johnson, M, Domier, C W, Spear, A, Barnett, L R, Luhmann, N C, Young-Min Shin
Format: Conference Proceeding
Language:eng ; jpn
Subjects:
Cavity resonators
Cold Test
Fabrication
Fixtures
LIGA
MEMS
Micromechanical devices
Radio frequency
Resists
Security
THZ sources
TWT
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Summary:In this paper we report precision MEMS Fabrication using novel LIGA technique for 0.22 THz micro-metallic staggered double-vane TWT circuits. For this high aspect ratio structure negative tone photo-resist KMPR was used. The entire fabrication process starting from spin coating, UV-lithography, electroforming and mold removal processing was fully characterized. Finally, the high tolerance TWT structure with smoothness (50-80 nm) was aligned in a specially engineered fixture for RF measurements in the BWO range 165-270GHz. The experiment showed excellent transmission 5-8 dB in frequency range 210-265 GHz. This result showed a distinct potential of applying this precision fabrication technique for the mass production of THz sources.
DOI:10.1109/IVEC.2011.5746982