Understanding and modeling AC BTI

We present a model for AC NBTI which is based on capture and emission of charges in and out of oxide border traps. Capture and emission time constants of these traps are widely distributed from >;μs to >;10 5 s and have been experimentally determined. The model gives a good quantitative unders...

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Bibliographic Details
Main Authors: Reisinger, Hans, Grasser, Tibor, Ermisch, Karsten, Nielen, Heiko, Gustin, Wolfgang, Schlunder, Christian
Format: Conference Proceeding
Language:English
Subjects:
AC-stress
Degradation
Delay
Filling
Frequency dependence
Frequency measurement
NBTI
recovery
Stress
Stress measurement
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Summary:We present a model for AC NBTI which is based on capture and emission of charges in and out of oxide border traps. Capture and emission time constants of these traps are widely distributed from >;μs to >;10 5 s and have been experimentally determined. The model gives a good quantitative understanding of experimental data from alternating stress / recovery sequences. It also provides a physical understanding of all the special features seen in AC NBTI independently of technology parameters.
ISSN:1541-7026
1938-1891
DOI:10.1109/IRPS.2011.5784542