Nanoscale oxidation of silicon microring resonators

The resonance frequency of a silicon microring was permanently blue-shifted with 1.2 GHz resolution over more than 350 GHz, a full free-spectral-range, by electrochemically changing the waveguide core (silicon) to the cladding (silicon dioxide) material.

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Bibliographic Details
Main Authors: Shen, Yiran, Mookherjea, Shayan
Format: Conference Proceeding
Language:English
Subjects:
Fabrication
Nanoscale devices
Optical resonators
Optical waveguides
Oxidation
Resonant frequency
Silicon
Online Access:Request full text
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Description
Summary:The resonance frequency of a silicon microring was permanently blue-shifted with 1.2 GHz resolution over more than 350 GHz, a full free-spectral-range, by electrochemically changing the waveguide core (silicon) to the cladding (silicon dioxide) material.
ISSN:2160-8989
2160-9004
DOI:10.1364/CLEO_SI.2011.CThZ2