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Parallel laser microfabrication of three-dimensional structures corrected for optical aberrations

An adaptive optical element is employed to generate multiple fabrication spots while also compensating for any optical aberration present in the system. We present rapid diffraction limited optical fabrication in a range of interesting substrates.

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Bibliographic Details
Main Authors: Salter, Patrick, Jesacher, Alexander, Simmonds, Richard, Booth, Martin
Format: Conference Proceeding
Language:English
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Description
Summary:An adaptive optical element is employed to generate multiple fabrication spots while also compensating for any optical aberration present in the system. We present rapid diffraction limited optical fabrication in a range of interesting substrates.
ISSN:2160-8989
2160-9004
DOI:10.1364/CLEO_AT.2011.JMG1