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Parallel laser microfabrication of three-dimensional structures corrected for optical aberrations
An adaptive optical element is employed to generate multiple fabrication spots while also compensating for any optical aberration present in the system. We present rapid diffraction limited optical fabrication in a range of interesting substrates.
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Main Authors: | , , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Online Access: | Request full text |
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Summary: | An adaptive optical element is employed to generate multiple fabrication spots while also compensating for any optical aberration present in the system. We present rapid diffraction limited optical fabrication in a range of interesting substrates. |
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ISSN: | 2160-8989 2160-9004 |
DOI: | 10.1364/CLEO_AT.2011.JMG1 |