Rapid non-lithography based fabrication process and characterization of Parylene C bellows for applications in MEMS electrochemical actuators

We present a rapid (1 day), modular, high-yield (~90%) fabrication process for Parylene C bellows and their mechanical characterization. Load-deflection testing was performed on bellows of varying convolution numbers (1.0, 2.0, and 3.0) and compared to both finite element modeling (FEM) simulations...

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Bibliographic Details
Main Authors: Gensler, H., Sheybani, R., Meng, E.
Format: Conference Proceeding
Language:English
Subjects:
actuator
Actuators
Analytical models
Bellows
Convolution
electrochemical
Fabrication
Finite element methods
Parylene C
Testing
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Summary:We present a rapid (1 day), modular, high-yield (~90%) fabrication process for Parylene C bellows and their mechanical characterization. Load-deflection testing was performed on bellows of varying convolution numbers (1.0, 2.0, and 3.0) and compared to both finite element modeling (FEM) simulations and an analytical model based on membrane deflection theory. Bellows produced a consistent load response. Actuators (consisting of electrodes, electrolyte, and bellows) were assembled and then integrated into a polydimethylsiloxane (PDMS, or silicone rubber) drug reservoir. Preliminary results indicate accurate (
ISSN:2159-547X
DOI:10.1109/TRANSDUCERS.2011.5969553