Electrical monitoring of gate and active area mask misalignment error

A model-free, gate-diffusion (PC-RX) misalignment monitor circuit is implemented in 32nm CMOS for fabrication tool and layout ground rule characterization. It requires only DC current measurements compared to existing optical methods that require special microscopy equipment. An on-chip circuit is a...

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Bibliographic Details
Main Authors: Bansal, A., Singhee, A., Acar, E., Costrini, G.
Format: Conference Proceeding
Language:English
Subjects:
Current measurement
Decoding
Fabrication
FETs
Layout
Logic gates
Optical variables measurement
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Description
Summary:A model-free, gate-diffusion (PC-RX) misalignment monitor circuit is implemented in 32nm CMOS for fabrication tool and layout ground rule characterization. It requires only DC current measurements compared to existing optical methods that require special microscopy equipment. An on-chip circuit is also designed to convert misalignment to digital data to enable post-Si repair.
ISSN:2158-5601
2158-5636