A nanometer scale alignment method of concentric spherical mirrors based on interferometry

A nanometer scale alignment method of spherical concentric mirrors based on dual-beam interferometry is proposed, which is also the method to measure the defocus of concentric spherical mirrors. In the process of aligning the concentric spherical mirrors, the defocus can be measured real time with n...

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Bibliographic Details
Main Authors: Liu Yu-juan, Tang Yu-guo, Chen Shaojie, Xu Tai, Pan Ming-zhong
Format: Conference Proceeding
Language:English
Subjects:
Adaptive optics
concentric
interferometry
Mirrors
nanometer scale
Optical distortion
Optical interferometry
Optical surface waves
Surface waves
Testing
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Summary:A nanometer scale alignment method of spherical concentric mirrors based on dual-beam interferometry is proposed, which is also the method to measure the defocus of concentric spherical mirrors. In the process of aligning the concentric spherical mirrors, the defocus can be measured real time with nanometer scale error. The experimental result shows that the method can achieve the defocus of the spherical concentric mirrors several nanometers.
ISSN:2159-3523
DOI:10.1109/INEC.2011.5991621