Ultra-low reflectance, high absorption microcrystalline silicon nano-stalagmite (µc-SiNS)

In this work, microcrystalline silicon nano-stalagmite (μc-SiNS) arrays have been successfully fabricated on glass by catalytic etching process through a template. The template use polystyrene (PS) nanospheres with diameter and density of 30 ~ 50 nm and 10 10 /cm 2 , respectively by a modified nano-...

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Bibliographic Details
Main Authors: Thiyagu, S., Zingway Pei, Yu-Hung Chen, Jun-Chin Liu
Format: Conference Proceeding
Language:eng ; jpn
Subjects:
Absorption
Etching
light tapping
microcrystalline silicon
Nanostalagmite
Photovoltaic cells
Photovoltaic systems
Polystyrene Nanospheres
Silicon
ultra-low reflection
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Summary:In this work, microcrystalline silicon nano-stalagmite (μc-SiNS) arrays have been successfully fabricated on glass by catalytic etching process through a template. The template use polystyrene (PS) nanospheres with diameter and density of 30 ~ 50 nm and 10 10 /cm 2 , respectively by a modified nano-phase separation of PS-containing block copolymer. The length of μc-SiNS could be controlled by the duration of etching time. The μc-SiNS exhibit ultra-low reflection approximately 0.3% and absorption around 99% over 300 to 800 nm in wavelength.
ISSN:2159-3523
DOI:10.1109/INEC.2011.5991682