Use of method for chemical etching for identification of structure of proton exchange channel waveguides fabricated on Z-cut of lithium niobate crystal

It was established by chemical etching that proton exchange on the surface of LN +Z cut in the molten benzoic acid at the temperature of 190°...210°C during 1...4 h causes fabrication of channel waveguides, consisting of 3 proton exchange phases.

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Bibliographic Details
Main Authors: Kichigin, V. I., Mushinsky, S. S., Petukhov, I. V., Shevtsov, D. I., Volyntsev, A. B.
Format: Conference Proceeding
Language:English
Subjects:
chemical etching
Chemicals
Crystals
Etching
Lithium niobate
Optical waveguides
Planar waveguides
proton exchange
Protons
Online Access:Request full text
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Description
Summary:It was established by chemical etching that proton exchange on the surface of LN +Z cut in the molten benzoic acid at the temperature of 190°...210°C during 1...4 h causes fabrication of channel waveguides, consisting of 3 proton exchange phases.
ISSN:1815-3712
DOI:10.1109/EDM.2011.6006898