Piezoresistive Strain Sensors and Multiplexed Arrays Using Assemblies of Single-Crystalline Silicon Nanoribbons on Plastic Substrates

This paper describes the fabrication and properties of flexible strain sensors that use thin ribbons of single-crystalline silicon on plastic substrates. The devices exhibit gauge factors of 43, measured by applying uniaxial tensile strain, with good repeatability and agreement with expectation base...

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Bibliographic Details
Published in:IEEE transactions on electron devices 2011-11, Vol.58 (11), p.4074-4078
Main Authors: Sang Min Won, Hoon-Sik Kim, Nanshu Lu, Dae-Gon Kim, Del Solar, Cesar, Duenas, Terrisa, Ameen, Abid, Rogers, John A.
Format: Article
Language:English
Subjects:
Acoustic wave devices, piezoelectric and piezoresistive devices
Applied sciences
Arrays
Cross-disciplinary physics: materials science
rheology
Devices
Diodes
Electronics
Exact sciences and technology
Flexible circuits
General equipment and techniques
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Materials science
Mathematical models
Multiplexing
Nanoscale materials and structures: fabrication and characterization
Nanostructure
Other topics in nanoscale materials and structures
Physics
Piezoresistance
Resistors
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Sensors
Sensors (chemical, optical, electrical, movement, gas, etc.)
remote sensing
Silicon
Silicon substrates
single-crystalline silicon sensor
Strain
strain gauge
Substrates
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Description
Summary:This paper describes the fabrication and properties of flexible strain sensors that use thin ribbons of single-crystalline silicon on plastic substrates. The devices exhibit gauge factors of 43, measured by applying uniaxial tensile strain, with good repeatability and agreement with expectation based on finite-element modeling and literature values for the piezoresistivity of silicon. Using Wheatstone bridge configurations integrated with multiplexing diodes, these devices can be integrated into large-area arrays for strain mapping. High sensitivity and good stability suggest promise for the various sensing applications.
ISSN:0018-9383
1557-9646
DOI:10.1109/TED.2011.2164923