Comparison between the silicon microrings fabricated by Gaussian and variable shape electron beam lithography

We report the morphological quality of microring filters fabricated by Gaussian and variable shaped electron beam lithography methods. The former yields smoother sidewall and better coupling coefficient control.

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Bibliographic Details
Main Authors: Zhi-Wei Zeng, Tsung Han Yang, Yao-Jen Lee, Yung Jui Chen, Shiuh Chao
Format: Conference Proceeding
Language:English
Subjects:
Fabrication
Online Access:Request full text
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Description
Summary:We report the morphological quality of microring filters fabricated by Gaussian and variable shaped electron beam lithography methods. The former yields smoother sidewall and better coupling coefficient control.
ISSN:2166-8884
2166-8892